Demonstration of miniaturized 20mW CW 280 nm and 266 nm solid-state UV laser sources

Oxxius deep UV laser sources today

Published at SPIE Photonics West 2015, this paper presents a miniaturized CW UV laser approach generating deep UV output at both 280 nm and 266 nm from compact monolithic DPSS cavities.. By frequency-doubling the output of 561 nm and 532 nm monolithic sources in separate 16 mm external cavities, the architecture achieves more than 20 mW of deep UV power with high stability, low noise, and complete insensitivity to mechanical vibrations — a critical requirement for portable and OEM-integrated instruments.

The two target wavelengths address distinct analytical needs: 266 nm for resonant UV Raman spectroscopy and semiconductor inspection, and 280 nm for protein detection and fluorescence excitation of tryptophan residues. Both wavelengths are difficult to reach with conventional diode sources, making compact DPSS alternatives particularly valuable. This work extends Oxxius’s monolithic cavity expertise into the deep UV range and underpins the LCX-266 and related deep UV sources currently available in the Oxxius product line.

Abstract

Visible 561 nm and 532 nm laser emissions from 14-mm long DPSS monolithic cavities are frequency converted to deep UV 280 nm and 266 nm in 16-mm long monolithic external cavities. Wavelength conversion is fully insensitive to mechanical vibrations and the whole UV laser sources fit in a miniaturized housing. More than 20 mW deep UV laser emission is demonstrated with high power stability, low noise and good beam quality. Aging tests are in progress but long lifetimes are expected thanks to the cavity design. Protein detection and deep UV resonant Raman spectroscopy are applications that could benefit from these laser sources.