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Oxxius has been working for several years with major lithography players and develops technical solutions with them.

The 375 nm, 395 nm and 405 nm lasers are particularly popular for their beam quality, excellent beam pointing and power stability.

  • Lasers specifications:
  • High power stability
  • High beam quality
  • High beam pointing stability
  • Custom beam available
  • Long lifetimes
  • Easy to use, lower maintenance, compact footprint
  • Lowest noise
  • Fiber coupling option with SM, PM or MM fiber

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